1、參考SEMI標準
E4-0699 SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
E5-0600 SEMI Equipment Communications Standard 2 Message Content (SECS-II)
E37-95 High-Speed SECS Message Services (HSMS) Generic Services
E37.1-96 High Speed Message Services HSMS-SS)
E30-0200A Generic Model for Communications and Control of Manufacturing Equipment (GEM)
2、設置通信參數
設置設備的連線模式、時間、端口、IP、初始狀態、在線狀態、離線狀態、Function模式、通訊格式化等初始工作
3、連接模式(借別人圖)
4、控制狀態模式(借別人圖)
5、設備狀態(借別人圖)
6、Parameter的設置(PPC或PMS)
以上,瞭解了整 個設備端的通訊要求,後繼..